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  • Offer Profile
  • centrotherm has been developing and realizing innovative thermal solutions for over 50 years. As a leading and globally operating technology group, we offer production solutions for the photovoltaic, semiconductor and microelectronic industries.

    The continuous further development of our successful solutions in thermal processing and coating, such as for manufacturing crystalline solar cells and power semiconductors, form the basis for our successful partnerships with industry, research and development.

     
Product Portfolio
  • Photovoltaics

  • Diffusion, oxidation and plasma coating processes, as well as thermal processing of mono and multi-crystalline solar cells are among the core competencies of centrotherm. Our production systems are being utilized around the globe and have a proven track record in terms of process stability and machine availability in the complex mass production of solar cells. Our vast process expertise, research & development experience, as well as our in-house cell development also enable us to offer engineering services, comprehensive process consulting services, technology packages and even fully integrated production solutions. Our sustainable manufacturing concepts of today are already designed for tomorrow’s process technology and can be readily and expediently upgraded. Therefore, it is possible to integrate new cell concepts, such as our centaurus technology or alternative coating or laser processes, into existing production lines.

    As one of the pioneers in the photovoltaic industry, centrotherm commands more than 30 years of experience and has established itself as a strong partner for leading cell manufacturers all over the world. We are consistently pursuing the objective of reducing the production costs per watt peak and enabling photovoltaic solutions to successfully compete with conventional forms of energy generation. Having written a success story that is truly one-of-a-kind in this market, we have implemented more than 50 turnkey production lines and more than 2000 single process systems, which means that we possess prominent installed production capacities and a broad presence on the PV market.
      • DIFFUSION FURNACE

      • Tube furnace for diffusion, oxidation and annealing in c-Si solar cell processing

        Processes
        Diffusion (POCl3, BBr3, BCl3)
        Annealing
        Wet and dry Oxidation (optional: DCE, HCl)
        Further processes upon request
      • Low Pressure Diffusion Furnace

      • Tube furnace for low pressure diffusion processes

        Processes
        POCl3 Diffusion
        BBr3 Diffusion
      • PECVD System

      • Batch-type system for passivation and nitride coating in c-Si solar cell processing

        Processes
        PECVD-Nitride
        PECVD-Oxide
        PECVD-Oxinitride
        Multi-Layer
        Further processes upon request
      • Fast Firing Furnace

      • Inline furnace for co-firing and sintering of metallization

        Processes
        Firing of front side metallization Alloying of rear side contact Drying of metallization paste
      • R&D System

      • Batch-type system for R&D c-Si solar cell applications

        Processes
        Atmospheric
        Diffusion | Oxidation | Sintering | Annealing
        Low Pressure
        Oxide | Nitride | Oxinitride
        LPCVD
        Polysilicon | Siliziumnitride | Oxide | Oxinitride
      • FULL PRODUCTION SOLUTIONS

      • From planning to start-up to finished solar cell
        Our Full Production Solutions program offers you production lines that have been tailored to your requirements for the production of mono and multi-crystalline solar cells. The scope of these services comprises the centrotherm core processes as well as the OEM process systems specified by us and the respective automation solutions. Thanks to the perfect detailed coordination of the overall process, we are in a position to guarantee the key performance parameters, such as solar cell efficiency, production throughput and yield - in connection with low production costs.
    • SEMICONDUCTOR

    • As one of the leading developers and manufacturers of production equipment for the semiconductor industry, we offer a broad spectrum of processes for various technologies and applications, such as logic and memory devices (e.g. Flash, DRAM), power semiconductors (e.g. Si, SiC), LED, SMT, MEMS or sensor technology.
      • Annealing (e.g. implant annealing, diffusion),
      • Formation (e.g. LPCVD, plasma oxidation, RTO)
      • Modification (e.g. oxide nitridation and silicide formation) of layers
      Our team of highly qualified process engineers devises innovative solutions for the ever more exacting demands of the industry, which mandate the availability of electronic components that are becoming increasingly miniaturized, while offering more functions and higher speed than the previous generation. Therefore the following equipment is applied:
      • Horizontal and vertical batch systems (atmospheric or vacuum processes)
      • Single wafer systems (RTP, low-temperature microwave oxidation)
      • Vertical high temperature furnaces (annealing up to 2000 °C and oxidation up to 1350 °C)
        • Activator 150

        • High-temperature furnace for SiC and GaN annealing and Graphene growth

          Process
          Annealing
        • OXIDATOR 150

        • High-temperature oxidation furnace

          Process
          Oxidation
        • Verticoo 200

        • Vertical wafer process system for mass production

          Processes
          Annealing
          Diffusion
          LPCVD
        • Verticoo Mini

        • Wafer process system for small-size production and R&D

          Processes
          Annealing
          Oxidation
          Diffusion
          LPCVD
          PECVD
        • E2000

        • Wafer process system for mass production

          Processes
          Annealing
          Oxidation
          Diffusion
          LPCVD
          PECVD
        • E1550

        • Wafer process system for small and middle-size production

          Processes
          Annealing
          Oxidation
          Diffusion
          LPCVD
          PECVD
        • E1200

        • Wafer process system for small-size production and R&D

          Processes
          Annealing
          Oxidation
          Diffusion
          LPCVD
          PECVD
        • c.PLASMOXLT

        • Low temperature microwave plasma oxidation

          Processes
          Plasma oxidation
          Nitridation
          In-situ Annealing
        • c.RAPID200

        • Rapid Thermal Processing for compound semiconductor and silicon

          Processes
          Ion implant annealing
          Silicide formation (Ti, Co, Ni, Pt, etc.)
          Oxidation
          PSG reflow
          Metallization annealing
          Further applications
      • MICROELECTRONICS

      • As longtime developer and manufacturer of production equipment for the microelectronics industry, we offer a broad spectrum of thermally activated processes for a wide range of technologies and applications, such as thick film processes or DCB , LTCC, and MLCC manufacturing:
        • Soldering of power semiconductors, optoelectronics and high temperature components (atmospheric and high pressure)
        • Drying and sintering for thick film technologies (DS)
        • Firing processes for Low Temperature Cofired Ceramics (LTCC)
        • Firing processes for Multi Layer Chip Capacity (MLCC)
        • Remelting and connection processes for Direct Copper Bonding (DCB)
        Our team of highly qualified process engineers devises innovative solutions for the ever more exacting demands of the industry, which mandate the availability of electronic components that are becoming increasingly miniaturized, while offering more functions and higher speed than the previous generation:
        • Oxidizing, reductive and passive process conditions
        • Optimal thermal transition and efficient cooling technology
        • Exact and repeatable temperature control thanks to digital state-of-the-art measuring and control functions
        • Particle-free and low-mass transport apparatus for highly sensitive components
        • Temperature ranges from 20 – 2000°C (according to application)
          • VLO 180 | VLO 300

          • Vacuum Soldering Systems for high volume production Processes - Advanced Packaging - Power Semiconductors - Sealing - Soldering

            Processes
            Advanced
            Packaging
            Power
            Semiconductors
            Sealing
            Soldering
          • VLO 20

          • Vacuum Soldering System for small volume production and R&D

            Processes
            Advanced Packagingg
            Power Semiconductors
            Sealing
            Soldering
          • VLO 6 | VLO 12

          • Vacuum Soldering Systems for Advanced Packaging and R&D

            Processes
            Advanced Packaging
            Power
            Semiconductors
            Sealing
            Soldering
          • VLO HP

          • High-Pressure Vacuum Soldering System for Advanced Packaging

            Processes
            Power Semiconductors
            Advanced Packaging
            Hybrid Microelectronic Assemblies
            Optoelectronic Packaging
            Hermetic Package Sealing
            Wafer Level Packaging
            UHB LED Packaging
            MEMS Package Sealing
          • Conveyor Furnace DO-DS

          • Conveyor furnace for serial production and R&D

            Processes
            Thick film
            MLCC
            LTCC
            DCB
            Annealing (100% H2)
            Glas/ metal sealing
        • Customer Service

            • PHOTOVOLTAICS

            • We develop and manufacture highly efficient thermal process systems that are designed to meet stringent standards with regard to high availability and productivity. Our customers use our equipment around the world around the clock and place their trust in its absolute reliability. In order to be able to continuously guarantee that we meet these expectations, we have established a global service network that warrants that you will enjoy first rate services paired with expeditious response times at all times.

              In addition to repair, maintenance and servicing work, we are at your side as your experienced partner accompanying your production operations and providing process consulting services and upgrades, training programs as well as machine refurbishments and relocations.
            • Semiconductor & Microelectronics

            • We provide engineering and process-technology services for our customers in the semiconductor industry. We continue to support our clients with service offerings and consulting services after commissioning and enable the further improvement of existing production systems through upgrades.

              Our services at a glance
              • Delivery, assembly and commissioning of production systems on-site
              • Training of customer staff in the operation of production systems
              • Purchasing of replacement parts required for the continuous operation of production systems
              • Supplementary service offerings and consulting for systems in ongoing production processes (e.g. remote systems)
              • Remote control and maintenance ensures fast analysis and troubleshooting of system errors
              • Optimization of processes and production stages
              • Maintenance services
              • Retrofittings, refurbishments and upgrades of equipment