Sensirion
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  • Offer Profile
  • Sensirion is a leading sensor manufacturer, providing relative humidity sensors and flow sensor solutions with unique performance. Together with our capacitive humidity sensor, the product range includes liquid flow sensors, mass flow meters, mass flow controllers and differential pressure sensors. Using our microsensor solutions, OEM customers benefit from the proven CMOSens® Technology and excellent technical support. Best-in-class products, unmatched experience and excellent application support make Sensirion the no.1 Partner. Among a large variety of applications, the flow and humidity sensors are successfully used in the automotive and medical industry.
Product Portfolio
  • Experts for Smart Sensor Solutions

  • Sensirion is a leading sensor manufacturer, providing relative humidity sensors and flow sensor solutions with unique performance. Together with our capacitive humidity sensor, the product range includes liquid flow sensors, mass flow meters, mass flow controllers and differential pressure sensors. Using our microsensor solutions, OEM customers benefit from the proven CMOSens® Technology and excellent technical support. Best-in-class products, unmatched experience and excellent application support make Sensirion the no.1 Partner. Among a large variety of applications, the flow and humidity sensors are successfully used in the automotive and medical industry.
      • Digital Humidity Sensors (RH/T)

      • Sensirion is the world’s leading manufacturer of digital relative humidity sensors. By pioneering digital humidity sensors 15 years ago, Sensirion has defined an industry standard with the SHTxx series. Best-in-class products, unmatched experience, and excellent application support make Sensirion the no. 1 partner for humidity sensing.

        Sensirion’s relative humidity sensors win over customers thanks to their high performance and integration (CMOSens® technology) in a miniature format. The capacitive humidity sensors provide digital and fully calibrated output that allows for easy integration without the need for additional calibration. Their excellent long-term stability is very well perceived and the cutting-edge low energy consumption makes them the right choice for any application.
          • Digital Humidity Sensor SHTW2 (RH/T)

          • The SHTW2 is Sensirion's 2nd generation WLCSP (wafer-level chip-scale package) humidity sensor, offering a complete digital humidity and temperature sensor system in a package so tiny that it fits into virtually any application. The SHTW2 comes in a flip chip package, which is an established technology and represents one of the simplest and smallest possible ways of packaging for a semiconductor chip. With a footprint of 1.3 x 0.7 x 0.5 mm3 the SHTW2 is only one-seventh of the size of a comparable DFN humidity sensor, which opens up a new category of ultra-small humidity sensors and enables countless new opportunities for the Internet of Things, wearable and mobile markets.

            The SHTW2 is based on Sensirion’s CMOSens® Technology, which offers a complete sensor system on a single chip, consisting of a capacitive humidity sensor, a band-gap temperature sensor, analog and digital signal processing, A/D converter, calibration data memory, and a digital communication interface supporting I2C fast mode.

            The humidity sensor covers a humidity measurement range of 0 to 100 %RH and a temperature measurement range of –30°C to 100°C with a typical accuracy of ±3 % RH and ±0.4 °C. The operating voltage of 1.8 V and the low power consumption make the SHTW2 humidity sensor suitable for wearable applications running on the tightest power budgets. With the industry-proven quality and reliability of Sensirion’s humidity and temperature sensors and constant accuracy over a large measurement range, the SHTW2 humidity sensor offers an unprecedented price-performance ratio. Tape and reel packaging together with its suitability for standard SMD assembly processes make the SHTW2 predestined for high-volume applications.

            Features
             
            Interface I²C
            Supply voltage 1.8 V
            Power consumption 2µW (at 1 reading per second in low power mode)
            Measuring range (RH) 0 - 100 % relative humidity
            Measuring range (T) -30 to +100°C (-22 to +212°F)
            Response time (RH) 8s (tau63%)
            Package type Wafer-Level-Chip-Scale-Package (WLCSP)
          • Digital Humidity Sensor SHTC1 (RH/T)

          • The SHTC1 is a digital humidity sensor designed especially for high-volume consumer electronics applications. This humidity sensor is strictly designed to overcome conventional limits for size, power consumption, and price-performance ratio, in order to fulfill the current and future requirements of the consumer electronics market.

            Sensirion’s CMOSens® technology offers a complete sensor system on a single chip, consisting of a capacitive humidity sensor, a band-gap temperature sensor, analog and digital signal processing, A/D converter, calibration data memory, and a digital communication interface supporting I2C fast mode. The ultra-small, 2 × 2 × 0.75 mm3 DFN package enables applications to be placed in even the most limited of spaces. The sensor covers a humidity measurement range of 0 to 100 %RH and a temperature measurement range of –30°C to 100°C with a typical accuracy of ±3 %RH and ±0.3°C.

            The operating voltage of 1.8 V and an energy budget below 1 µJ per measurement make the SHTC1 suitable for mobile or wireless applications running on the lowest power budgets. With the industry-proven quality and reliability of Sensirion’s humidity sensors and constant accuracy over a large measurement range, the SHTC1 humidity sensor offers an unprecedented price-performance ratio. Tape and reel packaging together with suitability for standard SMD assembly processes make the SHTC1 predestined for high-volume applications.

            Features
             
            Interface I²C
            Supply voltage 1.8 V
            Power consumption 2µW (at 1 reading per second in low power mode)
            Measuring range (RH) 0 - 100 % relative humidity
            Measuring range (T) -30 to +100°C (-22 to +212°F)
            Response time (RH) 8s (tau63%)
          • Digital Humidity Sensors SHT3x (RH/T)

          • The new digital SHT3x humidity sensor series takes sensor technology to a new level and as the successor of the SHT2x it is destined to become the next industry standard in humidity sensing. The SHT3x humidity sensor series consists of a low-cost version with the SHT30 humidity sensor, a standard version with the SHT31 humidity sensor, and a high-end version with the SHT35 humidity sensor, available in the second quarter of 2016. The SHT3x humidity sensor series combines multiple functions and various interfaces (I2C, analog voltage output) with a user-friendly, very wide operating voltage range (2.4 to 5.5 V). The SHT3x humidity sensor is available in both large and small volumes.

            The SHT3x builds on a completely new and optimized CMOSens® chip, which allows for increased reliability and improved accuracy specifications. The SHT3x offers a range of new features, such as enhanced signal processing, two distinctive and user-selectable I2C addresses, an alert mode with programmable humidity and temperature limits, and communication speeds of up to 1 MHz.

            The DFN package has a footprint of 2.5 × 2.5 mm2 with a height of 0.9 mm. This allows for integration of the SHT3x into a great variety of applications. Additionally, the wide supply voltage range of 2.4 to 5.5 V and variety of available interfaces guarantee compatibility with diverse integration situations. All in all, the SHT3x humidity sensor series incorporates 15 years of knowledge from Sensirion, the leader in the humidity sensor industry.

            Features

            Size 2.5 x 2.5 x 0.9 mm
            Output I²C, Voltage Out
            Supply voltage range 2.4 to 5.5 V
            Energy consumption 4.8µW (at 2.4 V, low repeatability, 1 measurement / s)
            RH operating range 0 - 100% RH
            T operating range -40 to +125°C (-40 to +257°F)
            RH response time 8 sec (tau63%)
          • Digital Humidity Sensor SHT2x (RH/T)

          • The digital SHT2x humidity sensor series is used in high volumes in a wide variety of applications and has today become the de facto industry standard. The SHT2x series consists of a low-cost version with the SHT20 humidity sensor, a standard version with the SHT21 humidity sensor, and a high-end version with the SHT25 humidity sensor. The open cavity mold package - which encapsulates the complete chip except for the humidity sensor area - protects the capacitive humidity sensor against external impact and facilitates excellent long-term stability. The SHT2x sensors are available both in large and small volumes.

            Embedded in a reflow solderable dual-flat no-leads (DFN) package of 3 × 3 × 1.1 mm3, the SHT2x provides calibrated, linearized sensor signals in digital, I2C format. The SHT2x humidity sensor series contains a capacitive-type humidity sensor, a band-gap temperature sensor, and specialized analog and digital integrated circuits – all on a single CMOSens® chip. This yields superior sensor performance in terms of accuracy and stability as well as minimal power consumption.

            Every sensor is individually calibrated and tested. Lot identification is printed on the sensor and an electronic identification code is stored on the chip – which can be read out on command. Furthermore, the resolution of the SHT2x humidity sensor can be changed on command (8/12 bit up to 12/14 bit for RH/T) and a checksum helps to improve communication reliability. With this set of features and its proven reliability and long-term stability, the SHT2x humidity sensor series offers an outstanding price-performance ratio. To test a humidity sensor from the SHT2x series, two evaluation kits, EK-H4 and EK-H5, are available.

            Series Version Typ. Humidity
            Accuracy %RH
            Typ.
            Temperature °C
            SHT20 Low-Cost ±3 ±0.3
            SHT21 Standard ±2 ±0.3
            SHT25 High-End ±1.8 ±0.2

            Features

            Size 3 x 3 x 1.1 mm
            Output I²C digital, PWM, SDM
            Supply voltage range 2.1 to 3.6 V
            Energy consumption 3.2µW (at 8 bit, 1 measurement / s)
            RH operating range 0 - 100% RH
            T operating range -40 to +125°C (-40 to +257°F)
            RH response time 8 sec (tau63%)
             
          • Digital Humidity Sensor SHT1x (RH/T)

          • The SHT1x digital humidity sensor is a reflow solderable sensor. The SHT1x series consists of a low-cost version with the SHT10 humidity sensor, a standard version with the SHT11 humidity sensor, and a high-end version with the SHT15 humidity sensor. As with every other Sensirion sensor type from the SHTxx humidity sensor family, they are fully calibrated and provide a digital output.

            The SHT1x humidity sensor series (including SHT10, SHT11, and SHT15) is Sensirion’s family of surface-mountable relative humidity sensors. The humidity sensors integrate sensor elements plus signal processing on a tiny footprint and provide a fully calibrated digital output. A unique capacitive sensor element is used for measuring relative humidity, while temperature is measured by a band-gap sensor. Its CMOSens® technology guarantees excellent reliability and long-term stability. The humidity sensors are seamlessly coupled to a 14-bit-analog-to-digital converter and a serial interface circuit. This results in superior signal quality, a fast response time, and insensitivity to external disturbances (EMC).

            Each SHT1x humidity sensor is individually calibrated in a precision humidity chamber. The calibration coefficients are programmed into an OTP memory on the chip. These coefficients are used to internally calibrate the signals from the sensors. The two-wire serial interface and internal voltage regulation allows for easy and fast system integration. SHT1x is supplied in a surface-mountable LCC (leadless chip carrier), which is approved for standard reflow soldering processes. The same sensor is also available with pins (SHT7x).

            Series Version Typ. Humidity
            Accuracy %RH
            Typ.
            Temperature °C
            SHT10 Low-Cost ±4.5 ±0.5
            SHT11 Standard ±3 ±0.4
            SHT15 High-End ±2 ±0.3

            Features

            Size 7.5 x 4.9 x 2.6 mm
            Output digital (2-wire Interface)
            Supply voltage range 2.4 to 5.5 V
            Energy consumption 80µW (at 12bit, 3V, 1 measurements/ s)
            RH operating range 0 - 100% RH
            T operating range -40 to +125°C (-40 to +257°F)
            RH response time 8 sec (tau63%)
             
          • Digital Humidity Sensor SHT7x (RH/T)

          • A digital pin-type relative humidity sensor for easy replaceability in a wide range of applications. The series consists of a standard version, SHT71, which convinces with its attractive price-performance ratio, and a high-end version, SHT75.

            A unique capacitive sensor element is used for measuring relative humidity, while temperature is measured by a band-gap sensor. The sensors integrate sensor elements and signal processing in compact format and provide a fully calibrated digital output. This results in the SHT7x humidity sensor’s easy replaceability, so that individual calibration is no longer necessary. The unique design of the SHT7x allows for the best possible thermal coupling to the environment and decoupling from potential heat sources on the main board. In combination with the individual precision calibration, the on-chip calibration memory, and the digital two-wire interface, this guarantees the best possible sensor performance in demanding applications with easy and fast system integration.

            The easy replaceability and low power consumption make the SHT7x humidity sensor series the ultimate choice for even the most demanding applications. The SHT7x humidity sensor series is supplied on FR4 with pins and is designed for the best possible performance. The same sensor is also available as an SMD package (SHT1x).

            Series Version Typ. Humidity
            Accuracy %RH
            Typ.
            Temperature °C
            SHT71 Standard ±3 ±0.4
            SHT75 High-End ±1.8 ±0.3

            Features
             
            Size 19.5 x 5.08 x 3.1 mm
            Output digital (2-wire Interface)
            Supply voltage range 2.4 to 5.5 V
            Energy consumption 80µW (at 12bit, 3V, 1 measurements/ s)
            RH operating range 0 - 100% relative humidity
            T operating range -40 to +125°C (-40 to +257°F)
            RH response time 8 sec (tau63%)
          • SF2 Filter Cap for SHT2x and SHT3x Humidity Sensors

          • Easily mountable solution to protect SHT2x and SHT3x humidity sensors. The SF2 filter cap protects against water, dust, soot, particles and other contaminants. It consists of a single piece of PBT and an integrated water vapor-permeable filter membrane.

            The cavity inside the cap is designed so that the dead volume between membrane and sensor is negligible; hence the impact on response time for humidity measurements is reduced to a minimum. The cap is available in black with a black filter membrane. The cap is made of a single piece of polybutylene terephthalate (PBT) with a filter membrane welded on. The cap is designed to be mounted after soldering by clipping the four pins on to the PCB. Together with the sensor, it provides a compact entity that can serve as an adaptor to the device housing. With the addition of adhesive for sealing to the PCB and use of an o-ring, it provides a waterproof mounting solution.

            Features
             
            Filtration Efficiency 99.99% of all particles > 0.1µm
            Protection class IP67

            Easily mountable after reflow soldering

          • Filter Cap SF1 for SHT1x Humidity and Temperature Sensors

          • Easily mountable solution to protect SHT1x humidity sensors. The SF1 filter cap protects Sensirion’s humidity sensors SHT10, SHT11 and SHT15 against water, dust, soot, particles and other contaminants. It consists of a plastic housing with a water vapor-permeable filter membrane.

            The cavity inside the filter cap is designed so that the volume between membrane and sensor is negligible; hence the impact on response time for humidity measurements is reduced to a minimum. The cap is available in white and is made of a single piece of polypropylene (PP) and a filter membrane welded to the single piece. The filter cap is designed to be mounted after soldering by clipping the two pins on to the PCB and welding them from the back. Together with the sensor, it provides a compact entity that can serve as an adaptor to the device housing. With the addition of adhesive for sealing to the PCB and use of an o-ring, it provides a waterproof mounting solution.

            Features

            Filtration Efficiency 99.99% of all 0.1µm particles
            RH response time of SHT1x 30 sec (tau63%) in slow moving air

            Easily mountable after reflow soldering
          • Evaluation Kits For Sensirion's Humidity Sensors

          • Our evaluation kits enable easy testing of our humidity and temperature sensors. We offer four different types of evaluation kit:

            • Evaluation Kit EK-H4 for SHT21, SHT31 and SHT71 on PCB:
            Easy-to-use plug-and-play system, read out data for four SHTxx humidity sensors simultaneously, connects to PC via USB.

            • Evaluation Kit EK-H4 Flex for SHTC1, SHTW1 and SHT3x on PCB:
            Same functionality as EK-H4 plus sensor samples on flex PCB for easy integration of sensors into limited spaces.

            • Evaluation Kit EK-H5 for SHT21 on PCB and SHT31 on PCB and flex:
            Very simple system (USB stick, single sensor cable and connector) enables fast and easy testing and sensor data read out and display on PC with minimal effort

            • Evaluation Kit EK-H5 for SHTC1, SHTW1 and STSC1:
            Same functionality as EK-H5, but designed for evaluation of 1.8V sensors.
        • High-Accuracy Digital Temperature Sensors

        • The high-accuracy digital temperature sensors are based on Sensirion’s CMOSens® technology, which combines the strengths of standard CMOS production processes and advanced MEMS technology on a single silicon chip. The working principle behind all STSxx temperature sensors is a silicon bandgap thermometer.

          Due to different requirements regarding power consumption and space, Sensirion is offering three types of high-accuracy temperature sensors. The universal STS3x temperature sensor has a wide supply voltage range of 2.4 to 5.5 V. Combined with its outstanding performance as well as high accuracy of ±0.3°C, it is ideally suited for integration into a wide variety of applications. The STSC1 temperature sensor focuses on consumer electronics applications that require very low power consumption and a tiny size. With compact dimensions of just 2 mm × 2 mm × 0.8 mm, low power consumption, and supply voltage of 1.8 V, it clearly fulfills industry requirements. The STS2x temperature sensor comes in a 3 mm × 3 mm × 1.1 mm package and operates at 2.1 to 3.6 V. It offers a typical temperature accuracy of ±0.3°C.

          The STSxx temperature sensors deliver high-accuracy, fully calibrated and processed digital temperature information. They come into play whenever there is a need for digital temperature information at low power consumption. In addition, the STS3x series has a built-in alert, which allows the sensor to be used as a watchdog.
            • Temperature Sensor STS3x

            • The STS3x is Sensirion’s newest high-accuracy digital temperature sensor series. The STS3x temperature sensor utilizes the industry-proven CMOSens® technology and wins over users with its increased intelligence, reliability, and improved accuracy specifications.

              The functionality of Sensirion’s new STS3x temperature sensor includes enhanced signal processing, two distinctive and user-selectable I2C addresses, and communication speeds of up to 1 MHz. The dual-flat no-leads (DFN) package has a footprint of 2.5 × 2.5 mm2 while retaining a height of 0.9 mm. This allows for easy integration of the STS3x series into various applications. Additionally, the wide supply voltage range of 2.4 to 5.5 V and low current consumption (2 µA typical average current at 1 measurement per second) guarantees compatibility with a wide range of applications.

              The STS3x temperature sensor gives a fully calibrated, linearized, and supply-voltage-compensated digital output and has an outstanding accuracy of +/–0.3°C (typical). There are two versions available: the standard version, STS31, guarantees an accuracy of ±0.3°C over a temperature range of –40°C to 90°C, while the low-cost version, STS30, has an accuracy range of 0°C to 65°C. Thanks to Sensirion’s CMOSens® technology, the STS3x temperature sensor is designed for mass production, comes with a high signal-to-noise ratio and high process capability, and is proven to be highly reliable and stable over the long term.

              An automotive version of the STS3x temperature sensor is also available.

              Features
               
              Output I²C
              Energy consumption 6.6µW (at 3.3 V, low repeatability, 1 measurement / s)
              T operating range -40 to +125°C (-40 to +257°F)
              T response time 2 sec (tau63%)
              Typical accuracy ±0.3 °C
            • STS21 - High Accuracy Digital Temperature Sensor

            • A 3x3mm, fully calibrated digital temperature sensor with impressive performance.

              Based on the same chip as the successful and industry proven SHT2x family of humidity and temperature sensors, the STS21 offers the same superior performance and space saving 3x3mm footprint. The temperature sensor features a different I²C address than the SHT2x and is pin compatible. Therefore it is custom-made for solutions in which temperature measurement is a prerequisite and humidity measurement is optional, as the same hardware can be used for both options.

              The outstanding accuracy and low power consumption paired with a competitive price make the STS21 an ideal solution for applications with high demands on both performance and economy.

              Features

              Output I²C
              Energy consumption 8.6µW (at 11bit, 1 measurement / s)
              T operating range -40 to +125°C (-40 to +257°F)
              T response time 5 sec (tau63%)
          • Upcoming Technologies

              • Multi-Pixel Gas Sensor SGP

              • The multi-pixel gas sensor SGP opens up new possibilities for, inter alia, the measurement of indoor air quality. The long-term stable metal-oxide gas sensor features multiple sensing elements on one chip providing in-depth information on air quality. The SGP gas sensor is based on Sensirion’s multi-pixel platform, which integrates four gas sensing elements into a very small 2.45 x 2.45 x 0.9 mm3 DFN package featuring a fully calibrated air quality output signal.

                The unprecedented combination of long-term stability and multi-pixel technology opens up new possibilities for environmental monitoring in smart home, appliances and Internet of Things applications. Thanks to its unique performance, the SGP allows the integration of metal-oxide gas sensors into mobile devices.

                Traditional metal-oxide gas sensors suffer from poor long-term stability including a rapid loss of sensitivity and a strong increase in response time. This degradation is caused through irreversible contamination by certain chemical compounds like siloxanes which are ubiquitous in real-life applications due to their widespread use in consumer products and production environments. Sensirion’s proprietary metal-oxide technology and multi-pixel platform provide the SGP with an unmatched robustness against these contaminants resulting in unique long-term stability and accuracy. Thus, with the SGP a reliable metal-oxide gas sensor is truly available!
              • Particulate Matter Sensor

              • Sensirion’s forthcoming PM2.5 sensor will define new market standards for accurate and reliable detection of PM2.5 and PM10.

                With this new particulate matter sensor, Sensirion expands its range of environmental sensing solutions and opens up a new dimension in indoor and outdoor air quality applications.

                PM2.5 and PM10 refer to particulate matter with particle diameter up to 2.5 microns and 10 microns, respectively, and are among the most dangerous air pollutants. Due to their small size, PM2.5 particles can travel deep into the human lung and cause a variety of health issues; for instance, by triggering asthma attacks or contributing to cardiovascular disease. Sensirion’s new PM2.5 sensor solution will enable the implementation of innovative air quality monitoring devices that prevent air pollution damage.
              • CO2 Sensor

              • CMOSens® Technology for IR detection enables carbon dioxide measurements of the highest accuracy at a competitive price.

                Along with the NDIR measurement technology for detecting CO2 comes a best-in-class Sensirion humidity and temperature sensor integrated on the very same sensor module. Ambient humidity and temperature can be measured by Sensirion’s algorithm expertise through modelling and compensating of external heat sources without the need of any additional components. The very small module height allows easy integration into different applications.

                Carbon Dioxide is a key indicator for indoor air quality. Thanks to new energy standards and better insulation, houses have become increasingly energy-efficient, but the air quality can deteriorate rapidly. Active ventilation is needed to maintain a comfortable and healthy indoor environment, and improve the well-being and productivity of the inhabitants. Sensirion sensor solutions offer an accurate and stable monitoring of CO2 in the air, as well as temperature and humidity. This enables our customers to develop new solutions that increase energy efficiency and simultaneously support the well-being of everyone.
            • Liquid Flow Meters

            • Sensirion’s liquid flow meters establish new standards wherever monitoring of low liquid flow rates, liquid handling, and liquid dispensing are important. Our unique CMOSens® Technology allows bidirectional measurement of the liquid flow through the wall of the sensor’s flow channel in milliliters, microliters, and down to single-digit nanoliters per minute. Applications in fields such as medical devices, diagnostics, process control, and automation technology benefit daily from our safe and reliable sensor solutions.
                • SLx Series

                    • Liquid Flow Meter SLI

                    • Designed for integration in demanding flow control systems, the SLI liquid flow meter series is a high precision solution for low flow rates of liquids based on water or hydrocarbons (alcohols, solvents, oil, fuel, adhesives). Sensirion’s modular approach, which allows the liquid flow meter to be combined with several interface cables, ensures an optimal match and simplifies the integration of a liquid flow meter into a fluidic system.

                      The short response time and high precision of the SLI liquid flow meter allow accurate monitoring of highly dynamic processes such as fast dosing operations. As with all other Sensirion liquid flow meters, this reliable device works without any moving parts, measuring through the wall of a straight flow path. Ultimate media compatibility of all wetted parts is ensured by the exclusive use of highly inert materials (glass, PEEK and flouropolymer sealing). The robust IP65 protected housing in a compact form makes the SLI flow meter the first choice for the measurement of low flow rates from single-digit microliters to several milliliters per minute in demanding applications in the life sciences and industrial automation.

                      Features
                      • Three sensor versions cover different flow ranges from microliters per minute to milliliters per minute
                      • Maximum flow rate for water-based liquids: 10 ml/min
                      • Maximum flow rate for hydrocarbons: 80 ml/min
                      • Repeatability: below 1% of the measured value
                      • Highest sensitivity down to <1 µl/min
                      • Fast response time down to 40 ms
                      • RS485, USB or 0-10 V analog voltage output
                      • Inert wetted materials: glass, PEEK, and fluoropolymer
                      • Maximum recommended operating pressure: up to 50 bar depending on flow range
                      • IP65 water and dust protection

                      Applications
                      • General process monitoring
                      • Pump control
                      • Fuel flow monitoring
                      • Lubricants dosage monitoring
                      • Monitoring of spray coating
                      • Conformal coating
                      • Leakage detection
                    • Liquid Flow Meter SLS-1500

                    • Featuring Sensirion’s innovative sensor technology in a robust housing, the SLS-1500 offers a versatile sensing solution for applications in demanding industrial environments and laboratory settings. Sensirion’s modular approach to combining sensor and interface cable ensures an optimal match, which means the integration of a flow sensor has never been easier.

                      Capable of fast and precise measurements for flow rates of 0 ml to 40 ml/min, the SLS-1500 enables closer process monitoring than ever before. With a typical response time of 20 ms, it measures highly dynamic dispensing processes quickly and reliably. The flow channel inside the sensor is completely straight, open and has no moving parts. Inert, wetted materials provide outstanding chemical resistance and excellent biocompatibility.

                      The SLS-1500 is compatible with SCC1 interface cables, offering USB, RS485 or analog voltage output connections. The most recent addition to Sensirion’s range of liquid flow sensors is a compact, cost-effective and precise sensor that is ready for immediate use.

                      Features
                      • RS485, USB or analog voltage output connections
                      • Fast response time of 20 ms
                      • Flow rates of 0-40 ml/min
                      • No moving parts
                      • Completely calibrated, digital linear output signal
                      • Compact Size
                      • Wetted materials: Stainless steel, PTFE und PEEK

                      Applications
                      • Diagnostics
                      • Analytical instruments
                      • Biomedical devices
                      • Fuel cells
                      • Industrial automation
                    • Liquid Flow Meter SLQ-QT500

                    • The SLQ-QT500 features a flow range of up to 120 ml/min for water-based and hydrocarbon-based liquids, such as alcohols, solvents, oil, fuel and adhesives. It is the first choice for measurement of liquids containing particles or with a high viscosity. The SLQ-QT500 in combination with one of the SCC1 sensor cables can be easily integrated into demanding coating systems in the semicon industry, as well as into a wide array of dispensing and liquid flow systems in other industries.

                      The high sensitivity and measuring speed offers new possibilities for the monitoring and control of fast dispensing processes. The sensor is available with calibrations for H2O and isopropanol (IPA). Due to its micro-thermal measurement principle and large inner diameter, the measurement performance of the SLQ-QT500 does not depend on the viscosity itself, and so there is no strict upper or lower viscosity limit (e.g. kinematic viscosities of up to ~1000 mm2/s). It is also ideal for liquids that contain small particles, as long as they do not abrade the quartz glass tube.

                      For wetted parts, only PFA for the fittings and quartz glass for the inner flow channel have been chosen. As with all other Sensirion liquid flow meters, this reliable device has no moving parts and measures through the wall of a straight flow path.

                      Features
                      • Maximum flow rate for hydrocarbons and water-based liquids: 120 ml/min
                      • For high- and low-viscosity liquids or for liquids with small particles
                      • Fast response time down to 50 ms
                      • Highest sensitivity down to the lowest flow rates
                      • RS485, USB, or 0-10 V analog voltage output
                      • Straight flow path, no moving parts
                      • Assured purity
                      • Superb chemical resistance
                      • Inert wetted materials: PFA and quartz glass
                      • Maximum recommended operating pressure: 12 bar

                      Applications
                      • High-end semiconductor process control
                      • High-viscosity applications
                      • Industrial automation
                      • Fast dosing operations
                    • Liquid Flow Meter SLQ-QT105

                    • Tailored to the integration in demanding coating systems, the SLQ-QT105 is a semicon grade-sensor solution for flow rates below 120 ml/min of hydrocarbon based liquids like photoresists and solvents.

                      Based on Sensirion's proven thermal microsensor technology, it opens new perspectives in terms of sensitivity, reliability and speed. The short response time of the SLQ-QT105 allows the accurate monitoring of highly dynamic processes such as fast dosing operations. Equipped with fittings for 4x3mm PFA tubing, this reliable device works without any moving parts measuring non-invasively through the wall of a straight flow path. A smart digital interface and robust RS485 communication is offered for long distance and bus capability.

                      Features
                      • Maximum flow rate for hydrocarbons: 120 ml/min
                      • Designed for photoresists and solvents
                      • Highest sensitivity down to the lowest flow rates
                      • Fast response time down to 30 ms
                      • RS485, USB or 0-10 V analog voltage output
                      • Superb chemical resistance
                      • Inert wetted materials: PCTFE, PFA, and quartz glass
                      • Assured purity
                      • Straight flow path, no moving parts
                      • Maximum working pressure: 3 bar (high pressure ratings available on request)

                      Applications
                      • High-end semiconductor process control
                      • Photoresist dispensing
                      • Fast dosing operations
                    • Liquid Flow Meter SLG

                    • The SLG liquid flow meters are the perfect solution for dynamic liquid flow monitoring in cutting edge Ultra-High-Pressure Liquid Chromatography (UHPLC) and other applications requiring precise measurement of ultra-low flow rates.

                      A highly sensitive CMOSens® microchip detects the mass flow through the wall of the fused silica flow channel. The flow channel withstands pressures up to 1200 bar / 17500 psi. At the same time the response time for measurements is 40 ms only. The combination of these properties enables the high-end devices of the SLG series to be especially suited for monitoring dynamic flow rates in cutting-edge chromatography systems. Great repeatability for analyses - the most important criterion in HPLC and microfluidic systems - is ensured. The maximum flow rate of the SLG-0075 is 5 µl/min in precision mode and 20 µl/min in extended mode. The SLG-0025 provides reliable liquid flow measurements down to 70 nl/min and even below. The SLG-0150 completes the SLG series with a slightly higher flow range than the SLG-0075, at a reduced pressure drop. It is the first choice for laboratory setups and leakage detection at moderate pressures up to 500 bar.

                      Features
                      • Three sensors versions with maximum flow rates of 1.5, 5.0, or 8.0 µl/min, extended range of the SLG-0075 up to 20 µl/min.
                      • Ultra low flow detection with 0.5 nl/min resolution
                      • Repeatability better than 0.6% of the measured value
                      • Response time: 40ms
                      • Media isolated, ultra high pressure resistance up to 1200 bar / 17500 psi
                      • Inert wetted materials: Flow path made of fused silica and PEEK sealing
                      • Stainless steel fittings for 1/16" OD tubing
                      • Calibrated RS485 interface, 0-10 V analog output, or I2C

                      Applications

                      • Ultra High Pressure Liquid Chromatography, LC/MS
                      • High-pressure/ultra-low flow analytical instruments and life science applications
                      • Leakage testing
                      • Microfluidics
                  • Lx Series

                      • Liquid Flow Meter LG16

                      • The LG16 liquid flow meters offer Sensirion’s CMOSens® microsensors in a compact and stripped-down housing for integration into instruments and other closed systems.With five different flow ranges, calibration options for different media (H 2O and/or hydrocarbons), and a selectable electrical interface (digital I2C or 0-5 V analog), the LG16 liquid flow meters offer a comprehensive solution for measuring low and ultra-low flow rates. All subtypes feature the strengths of Sensirion’s liquid flow meters: fully calibrated digital flow sensing, inert wetted materials (glass, PEEK, fluoropolymer), fast response times (down to 40 ms and below), and low power consumption.

                        They offer the ideal solution for measuring highly dynamic fluidic processes, closed-loop control of microfluidic systems, bead and droplet count, or bubble detection. The 5 subtypes cover maximum flow rates from 1.5 µl/min by the smallest version (LG16-0025) up to 5 ml/min (LG16-2000) for water and aqueous solutions. With hydrocarbon liquids such as oils, organic solvents, fuel, or lubricants, flow rates up to 80 ml/min can be measured (see LG16-2000HC-D).

                        Features
                        • LG16 series for flow rates from nl/min up to 5 ml/min
                        • Resolutions down to the sub nl-range
                        • Response time: 40 ms
                        • Digital I2C interface or analog output 0-5 V
                        • Supply voltage range 7 V - 12 V (analog output) or 3.5 V - 12 V (digital interface)
                        • Inert wetted materials: flow channel made of glass (borosilicate or fused silica)
                        • Excellent media compatibility and chemical resistance
                        • Media isolated sensing principle - no direct sensor contact with the fluid

                        Applications
                        • Medical applications
                        • Point-of-care diagnostic devices
                        • Vaporizers
                        • Environmental testing units
                      • Liquid Flow Meter LG01

                      • The LG01 Flow Switch sensor detects ultra-low liquid flow rates or the presence of air in fluidic systems and therefore makes them more reliable.

                        The detection of liquid flows is possible within the range of a few ml/min and less. The sensor's output signal of either 0 or 5 volts indicates whether the current flow rate is above or below the specified flow switch level. At flow rates above this limit the identification of air bubbles within the flow channel is equally consistent (leak detection). The non-invasive measurement principle of the liquid flow sensor LG01 allows detecting the current state of fluid through the wall of the internal glass capillary. Thus, the sensor provides highest bio-compatibility and chemical resistance. Measurements of the liquid flow detector are performed with a response time of less than 100ms.

                        Features
                        • Maximum flow rate up to 220 ml/min (valid for H2O)
                        • Standard flow switch threshold at 4.5 ml/min or 0.25 ml/min (valid for H2O)
                        • Air-/bubble detection
                        • Fluid connections: 1/4-28 standard fittings for OD 1/8" (3.2 mm) or 1/16" (1.6 mm) plastic tubing
                        • Response time: below 100 ms
                        • Inert wetted materials: glass, PEEK, and fluoropolymer
                        • Media isolated sensing principle - no direct sensor contact with the fluid
                        • Supply voltage of 5 - 12 V

                        Applications
                        • Biomedical devices
                        • Lab automation
                        • Process monitoring
                        • Leakage detection
                      • Liquid Flow Meter LS32-1500

                      • Sensirion offers the compact and chemical-resistant liquid flow meter LS32-1500 for integration into instruments and other closed systems with low flow rates of up to 40 ml/min.

                        With a compact form factor of just 18x18x59 mm3, the LS32-1500 liquid flow meter is mechanically extremely robust. Its fast response time of 20 ms, excellent repeatability and outstanding chemical resistance make the sensor ideal for use in biomedical applications. The sensor is highly versatile and can be used in fuel cells, for example, as well as a wide range of applications in dosage control and industrial automation monitoring.

                        The use of high-performance stainless steel, PTFE, and PEEK ensures outstanding media-compatibility and exceptional chemical resistance. Customized solutions (e.g. downmount version for manifold systems) based on the design of the LS32-1500 are also feasible.

                        The LS32-1500 liquid flow meter offers a cost-efficient, compact, and reliable sensor solution for the measurement of low flow rates and is an excellent addition to the range of high quality products from Sensirion.

                        Features
                        • Maximum flow rates for water-based liquids: 40 ml/min
                        • Fast response time of 20 ms
                        • No moving parts along the flow path
                        • Completely calibrated, linearized, and temperature-compensated digital output signal
                        • Compact size
                        • Inert wetted materials: 904L high-performance stainless steel, PTFE, und PEEK
                        • Digital I2C interface

                        Applications
                        • Diagnostics
                        • Analytical instruments
                        • Biomedical devices
                        • Fuel cells
                        • Industrial automation
                    • LPG10 / LD20 Series

                        • Liquid Flow Sensor LPG10

                        • With a tiny footprint of only 10x10 mm2, Sensirion’s LPG10 liquid flow sensor series provides outstanding performance and speed in measuring liquid flow in a planar microfluidic glass substrate with down-mount fluidic ports for a highly compact integration into any fluidic manifold system. It is thus ideal for high-volume applications with strict space limitations.

                          Two core technologies are combined at this point: microfluidics chips and digital microsensor chips. This unique approach enables measurement of liquid flow inside a cost-efficient planar glass substrate. The digital microsensor chip provides the full signal processing functionality for a fully calibrated, temperature compensated, and linearized digital output.

                          The LPG10 series is a smart sensor solution offering flow rates from the low microliter per minute range up to 1 ml/min. Glass as the only wetted material ensures optimum compatibility with biological and pharmaceutical processes.

                          Features

                          • Incredibly small foot print of 10mm x 10mm
                          • High speed: 30 ms response time and better
                          • Flow rates up to 1ml/min
                          • Completely calibrated, digital linear output signal
                          • Excellent bio-compatibility, chemically-resistant
                          • Media isolated sensing principle - no direct sensor contact with the fluid
                          • Supply voltage 3.3V - 3.6V
                          • Digital I²C interface
                        • Liquid Flow Sensor LD20

                        • Safe, precise, and reliable measurement of low flow rates in medical environment has never been so easy: The single-use liquid flow sensors of the LD20 series measure the liquid flow rate directly and at the point of interest for a more effective patient treatment and improved safety.

                          Nowadays, keywords and trends such as point-of-care, patient compliance, complex drug administering, and wearable designs demand the development of smart medical devices. The LD20 series combines Sensirion’s proven liquid flow sensing technology with a single-use, cost-optimized design for high volume applications in the medical, life-science or food industry. The sensor provides a bidirectional measurement of flow rates from 1300 ml/h down to single-digit ml/h, while it as well reliably detects common failure modes such as occlusion, free flow, or air bubbles with unprecedented speed and sensitivity.

                          The LD20 series optimizes costs by reducing the flow sensor to its bare minimum while still ensuring easy fluidic, electrical and mechanical connections. Barbed or luer lock fittings guarantee secure and straight-forward integration into the fluidic line: for example, into a catheter or an infusion set. Inert wetted materials provide outstanding chemical resistance and excellent media compatibility.

                          Features
                          • Maximum flow rate for water-based liquids: 1300 ml/h
                          • Bidirectional measurement and real time failure detection
                          • Highest sensitivity for detection of infiltration and multi-infusion settings
                          • Media isolation: No contact of the sensor chip with valuable medications or body fluids
                          • High speed measurement: Response time < 50 ms
                          • Low power consumption: Suitable for battery-powered applications
                          • Highly integrated: Fully calibrated, linearized, and temperature compensated digital I2C signal from a single chip
                          • Highly scalable sensor design: Competitive pricing for single-use applications
                      • Liquid Flow Meter Kit

                            • Liquid Flow Meter Kit

                            • In order to conduct initial measurements quickly and easily all our SLI, SLS, SLG, or SLQ liquid flow meters can be ordered as part of a Liquid Flow Meter Kit. Next to the liquid flow meter of your choice, the kit contains everything necessary to enable first measurements within 10 to 15 minutes. It is meant to provide you with a first impression of the CMOSens® Technology and the performance of our liquid flow meters.

                              Besides the standard Liquid Flow Meter Kits, we offer specific Evaluation Kits for the liquid flow sensors of the LG16, the LPG10 and LD20 Series. For the LPG10 series a pre-assembled manifold body is additionally included or a base station for electrical connection of the contact pads in case of the LD20 series.
                        • Mass Flow Meters for Gases

                        • With our long history of designing mass flow solutions for medical and industrial automation, Sensirion is your ideal partner to support you in the development of new products. Our mass flow meters ensure fast, accurate and economical measurements of gas flow over a wide dynamic range. They are extremly reliable and long-term stable and are free from zero-point drift.

                          At the heart of every mass flow sensor is a MEMS based calorimetric microsensor, which measures the gas flow using the thermal measurement principle. The sensor element is integrated with the complete signal conditioning electronics on one single chip. This unique integrated technological approach - provided by the unparalleled and innovative CMOSens® Technology - results in excellent performance at a very attractive cost.
                            • Mass Flow Meter SFM3000

                            • The SFM3000 is a digital flow meter especially suitable for high-volume applications. The design of the flow channel results in very low pressure drop through the sensor element, making it highly suitable for medical ventilation and respiration applications.

                              The SFM3000 bidirectionally measures the flow of air and other non-aggressive gases at rates up to 200slm with excellent accuracy and extremely high speed. It outputs a 14-bit digital signal at a 2kHz update rate. The signal is internally linearized and temperature compensated. Furthermore, the SFM3000 flow meter operates from a 5 Vdc supply voltage and features a digital 2-wire interface, making it easy to connect directly to a microcontroller.

                              The outstanding performance of the SFM3000 sensor is based on Sensirion's patented CMOSens® Technology, which combines the sensor element, signal processing and digital calibration on a tiny microchip. The gas is measured by a thermal sensor element to provide an extended dynamic range and enhanced long-term stability compared to other flow measuring technologies. Thanks to this proven CMOSens® Technology, the flow meter is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications.

                              Features
                              • Very low pressure drop < 6mbar @ 200sml
                              • Flow range: +/-200slm (bidirectional)
                              • Accuracy 1.5% m.v.
                              • Ultra fast response time
                              • Digitally calibrated & temperature compensated
                              • Digital Output (I²C)

                              Applications
                              • Ventilation, anaesthesia, inhalers and other medical instruments
                              • Process automation
                              • Burner control
                              • Fuell cell control
                              • Spectroscopy
                              • Environment monitoring
                              • Laboratory
                            • Mass Flow Meter SFM3100

                            • The analog mass flow meter SFM3100 is highly accurate and fast. The SFM3100 has a compact design and can be easily integrated into existing devices. There is a temperature sensor in the gas channel of the flow meter. This enables highly precise temperature compensation and obviates the need to integrate a dedicated temperature sensor.

                              The SFM3100 measures flow ranges between -24 and +240 slm. It can also detect negative flow ranges, thereby recognizing errors or impeded flows in a reliable manner. At the same time, multiple gases are compensated with great precision. The flow rates and signal characteristics can be customized to meet customer-specific requirements.

                              Like all Sensirion sensors, the analog mass flow sensor is based on the patented CMOSens® Technology, which combines the sensor and analysis electronics on a single microchip. The result is a highly stable and precise system for demanding and cost-sensitive applications. The SFM3100 is particularly suitable for inspiration applications as well as for mixing oxygen and air to a very precise degree.

                              Features
                              • Flow range: -24 to +240 slm
                              • Accuracy 5% m.v. (typ.)
                              • Ultra-fast response time
                              • Low pressure drop < 16mbar @ 200slm (typ.)
                              • Temperature sensor integrated
                              • Compact design, easy integration
                              • Gas compensation
                              • Detection of errors and impeded flows
                              • Customized flow rates and signal characteristics
                              • Analog output
                              • Fully calibrated and temperature compensated

                              Applications
                              • Ventilation (Inspiratory)
                              • Gas Mixture
                              • Inhalers
                            • Mass Flow Meter SFM3200

                            • The SFM3200 mass flow meter is characterized by its wide dynamic measurement range of up to 250 slm, as well as its measurement accuracy at low flows.

                              The special design of the flow channel results in a very low pressure drop through the flow body of the sensor, which makes it extremely suitable for medical ventilation and other respiratory applications. The thermal sensor element assures very fast signal processing time and bidirectional measurement mode, with the signal being internally linearized and temperature compensated.

                              The outstanding performance of the SFM3200 sensor is based on Sensirion's patented CMOSens® Technology. The technology allows the integration of the sensor element and the analysis electronics on a single, tiny CMOS silicon chip. The result is a highly stable and precise system for demanding and cost-sensitive applications.

                              Features
                              • Flow range: up to 250 slm (bidirectional measurement mode)
                              • Superior performance at very low flows
                              • Low pressure drop
                              • High robustness and reliability at variable inlet conditions
                              • Very fast signal processing time
                              • Signal internally linearized and temperature compensated

                              Applications
                              • Inspiratory flow measurement
                              • Respiratory measurements
                              • Ventilation
                              • Anesthesia
                              • Drug delivery
                            • Mass Flow Meter SFM3200-AW

                            • The SFM3200-AW mass flow meter is able to withstand autoclave procedures, making it autoclavable, cleanable and therefore reusable.

                              Due to the special design of its flow channel, the pressure drop through the sensor element is very low. Thus, the sensor is the perfect choice for expiratory flow measurements in medical applications. It measures flow rates highly accurate and performs superiorly not only at low flows, but also at rates up to 250 slm. Furthermore, the SFM3200-AW features a very fast signal processing time and superior robustness.

                              The SFM3200-AW sensor is, as are all Sensirion sensors, based on the patented CMOSens® Technology. The technology combines the sensor element and the analysis electronics on a single microchip. Thus, the CMOSens® gas flow sensor measures long-term stable and noise free and a very fast and highly precise sensor signal results.

                              Features
                              • Autoclavable and cleanable
                              • Flow rates: -100 to +250 slm (bidirectional)
                              • Superior performance at low flows
                              • Very low pressure drop
                              • Very fast signal processing time and superior robustness
                              • Medical cones for pneumatic connection to standard breathing circuits
                              • Mechanical interface for electrical reconnection

                              Applications
                              • Expiratory flow measurements
                              • Respiratory measurements
                              • Ventilation
                              • Anesthesia
                              • Metabolic measurements
                            • Mass Flow Meter SFM3300-AW

                            • The SFM3300-AW mass flow meter is able to withstand autoclave procedures, making it autoclavable, cleanable and therefore reusable.

                              The sensor can be used completely bidirectional und measures flow rates up to 250 slm in both directions. Thus, the SFM3300-AW is highly suited to proximal flow measurements in medical ventilation and other respiratory applications. The special design of the flow channel results in a small dead space and the slightly higher pressure drop leads to a lower dependency on different inlet conditions.

                              Like all Sensirion sensors, the outstanding performance of the SFM3300-AW is based on the innovative CMOSens® Technology, which combines the sensor element and the analysis electronics on a single CMOS microchip. Thus, the CMOSens® gas flow sensor measures long-term stable and noise-free and a very fast and highly precise sensor signal results.

                              Features
                              • Autoclavable and cleanable
                              • Flow rates: ±250 slm (bidirectional)
                              • Small dead space: < 10 ml
                              • Lower dependency on different inlet conditions
                              • Very fast update time (0.5 ms)
                              • Very fast signal processing time and superior robustness
                              • Medical cones for pneumatic connection to standard breathing circuits
                              • Mechanical interface for electrical reconnection
                              • Disposable solution under development

                              Applications
                              • Proximal flow measurement
                              • Expiratory flow measurement
                              • Ventilation
                              • Anesthesia
                              • Respiratory measurements
                              • Metabolic measurements
                            • Mass Flow Meter SFM3300-D

                            • The SFM3300-D flow sensor is a single-use sensor for proximal flow measurement in respiratory applications such as ventilation or anesthesia.

                              It features outstanding measuring accuracy and robustness as well as a short signal processing time. The digital flow sensor measures bidirectional flow volumes of up to 250 slm and is fully calibrated for air, N2 and O2 gases. The special design of the flow channel results in a low dead space volume and the slightly greater pressure drop ensures more stability compared to variable inlet conditions. The sensor also features medical cones for pneumatic connection to the respiratory cycle and has a mechanical interface for a user-friendly electrical connection. Thanks to its performance characteristics, the SDM3300-D mass flow meter is ideally suited for single-use proximal flow measurements in medical ventilation, hospital applications, residential care applications and emergency situations.

                              Features
                              • For proximal flow measurements
                              • Flow rates: ±250 slm (bidirectional)
                              • Fully calibrated
                              • Very fast update time (0.5 ms)
                              • Small dead space: < 10 ml
                              • Best-in-class accuracy
                              • Robust
                              • Low dependency on different inlet conditions
                              • Medical cones for pneumatic connection to standard breathing circuits
                              • Mechanical interface for electrical reconnection

                              Applications

                              • Proximal flow measurement
                              • Ventilation
                              • Anesthesia
                              • Respiratory measurements
                              • Metabolic measurements
                            • Mass Flow Meter SFM3400

                            • The SFM3400 flow sensor is a proximal flow sensor for neonatal and pediatric applications in respiratory devices such as ventilation or anesthesia. The sensor is available as both a single-use version (SFM3400-D) and a reusable version (SFM3400-AW). The reusable solution is autoclavable and washable.

                              The SFM3400 flow sensor features outstanding measurement accuracy and a short signal processing time as well as high robustness. The digital flow sensor measures bidirectional flow rates of up to 33 slm and is fully calibrated for air, N2 and O2 gases. The special design of the flow channel results in a low dead space volume of less than 1 ml. The sensor features standard medical cones for pneumatic connection to the respiratory cycle and has a mechanical interface for a simple and user-friendly electrical connection. Thanks to its performance characteristics, the SFM3400 mass flow meters are ideally suited for proximal flow measurements in neonatal and pediatric OEM applications, ventilation in hospitals, emergency situations and home care applications.

                              Features
                              • For neonatal and pediatric applications
                              • Reusable (autoclavable / washable) and single-use versions
                              • Flow rates: ±33 slm (bidirectional)
                              • Fully calibrated, no recalibration
                              • Very fast update time (0.5 ms)
                              • Small dead space: < 1 ml
                              • Best-in-class accuracy
                              • Robust
                              • Highest sensitivity
                              • Low dependency on different inlet conditions
                              • Medical cones for pneumatic connection to standard breathing circuits
                              • Mechanical interface for electrical reconnection

                              Applications

                              • OEM Applications
                              • Proximal flow measurement (neonatal and pediatric applications)
                              • Ventilation
                              • Anesthesia
                              • Respiratory measurements
                              • Metabolic measurements
                            • Mass Flow Meter SFM4100

                            • Designed for anaesthesia equipment, the CMOSens® mass flow meter SFM4100 precisely measures air and other non-aggressive gases. It provides an impressively wide dynamic measuring range up to 20 slm. The sensor unit has a digital I2C interface, provides a fully calibrated and temperature compensated output signal, and operates reliably at pressures of up to 7 bar.

                              Its outstanding long-term stability makes the SFM4100 first choice for products that require a high rate of deployment with long service intervals. For OEM projects, more than one gas calibration can be stored simultaneously in each sensor device. Self-test features allow testing of the entire signal chain (from capture of the analogue signal through digital signal chain) while the mass flow meter is in use. This makes the SFM4100 an optimal solution for safety-critical applications.

                              Features
                              • Measurement of flow rates from 0 to 20 l/min
                              • No drift
                              • Wide dynamic range (1:500)
                              • Digital I²C interface
                              • Digitally calibrated and temperature compensated
                              • Multigas Option

                              Applications
                              • Anaesthesia, inhalers and other medical instruments
                              • Analytical equipment
                              • Process Automation
                            • Mass Flow Meter SFM5400

                            • The SFM5400 mass flow meter measures mass flows with outstanding accuracy (errors < 1%), long-term stability and repeatability and covers an impressively wide dynamic measurement range. The SFM5400 is made of metal and highly configurable. It is available with a variety of fluidic connections and various interfaces and measures maximum flow rates between 50 sccm and 200 slm. The sensor signal is directly converted into a digital, completely calibrated and temperature-compensated signal on the chip. Multiple gas calibrations can be stored on a single device. Additionally, the flow meter can check whether the activated gas calibration matches the actual gas present. The SFM5400's versatility makes it the ideal solution for industrial and medical applications.

                              The outstanding performance of the SFM5400 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor element and the analog and digital processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is a durably stable, extremely fast and highly precise mass flow meter.

                              Features
                              • High accuracy at low flow rates (< 1 sccm)
                              • Excellent accuracy / repeatability (0.8% / 0.1% of measured value respectively)
                              • Wide dynamic range (turndown ratio 1000:1)
                              • Multiple gases and gas recognition
                              • Digital and analog interfaces
                              • Flexible mechanical connection options: down mount, VCR and VCO, Swagelok,
                              • C-/W-Seal, etc.
                              • Highly configurable
                              • MTBF 169 years - no recalibration required

                              Applications
                              • Analytical instruments (e.g. gas chromatography, mass spectrometry, thermal analysis)
                              • Medical devices (e.g. ventilation, anesthesia)
                              • Industrial process automation (e.g. coating, thermal processing)
                              • Semiconductor industry (e.g. plasma etching processes, thin film deposition)
                            • Mass Flow Meter SFM5300

                            • The SFM5300 mass flow meter enables the measurement of mass flows with outstanding accuracy (errors < 2%), long-term stability and repeatability. It boasts an impressive dynamic measurement range and a compact size. The SFM5300 mass flow meter is available with downmount connections and digital interfaces. The metal SFM5300 is the smaller variant of the SFM5400 mass flow meter and is exclusively for cost-sensitive OEM projects with high unit quantities.

                              The outstanding performance of the SFM5300 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor technology and the processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is the durably stable, extremely fast and highly precise SFM5300 mass flow meter.

                              Features

                              • High accuracy with low flow rates (< 1 sccm)
                              • Excellent accuracy / repeatability (2% / 0.2% of measured value respectively)
                              • Wide dynamic range (turndown ratio 1000:1)
                              • Compact size with downmount connection
                              • Multiple gases and gas recognition
                              • Digital interfaces
                              • Highly configurable
                              • MTBF 169 years - no recalibration required

                              Applications
                              • Analytical instruments (e.g. gas chromatography, mass spectrometry, thermal banalysis)
                              • Medical devices (e.g. ventilation, anesthesia)
                              • Industrial process automation (e.g. coating, thermal processing)
                              • Semiconductor industry (e.g. plasma etching processes, thin film deposition)
                            • Evaluation Kit EK-F3x

                            • The evaluation kit EK-F3x is designed for an easy and cost-efficient evaluation of Sensirion's SFM3000 digital mass flow meters. Test now the features of the mass flow meter. Especially at lowest flow rates, the sensor provides very low pressure drop, highest accuracy and fast response time.

                              The evaluation kit consists of a USB Stick with an adapter cable. The SFM3000 mass flow meter must be ordered separately. The EK-F3x viewer software as well as the datasheet of the SFM3000 can be downloaded here from the website. The viewer software is easy to install on your computer. No further calibration is necessary.

                              The software allows measuring at variable resolution and it displays mass flow in standard liter per minute (slm). Absolute or relative timing may be chosen and data are displayed in a graph. The software has the capability for easy data-logging and data may be exported to Excel format.

                              Features
                              • Fast and reliable evaluation (for a reduced time-to-market)
                              • Easy to connect to a PC
                              • High-performance measurements thanks to digital SFM3000 mass flow meter
                            • Evaluation Kit EK-F4x

                            • The evaluation kit EK-F4x is designed for a straightforward and cost-efficient evaluation of Sensirion's SFM4100 digital mass flow meters. Learn about the mass flow meter and experience its advantages. Especially at lowest flow rates, the sensor provides highest accuracy, no offset or drift and excellent long-term stability.

                              The evaluation kit consists of a USB Stick with an adapter cable. The SFM4100 mass flow meter must be ordered separately. The EK-F4x viewer software as well as the datasheet of the SFM4100 can be downloaded here from the website. The viewer software is easy to install on your computer. No further calibration is necessary.

                              The software allows measuring at variable resolution and it displays mass flow in standard liter per minute (slm). Absolute or relative timing may be chosen and data are displayed in a graph. The software has the capability for easy data-logging and data may be exported to Excel format.

                              Features
                              • Fast and reliable evaluation (for a reduced time-to-market)
                              • Easy to connect to a PC
                              • High-performance measurements thanks to digital SFM4100  mass flow meter
                          • Mass Flow Controllers for Gases

                          • Sensirion's mass flow controllers are characterized by fast and accurate control of gas flow over a wide dynamic range. Based on the innovative CMOSens® Technology, the heart of these mass flow controllers is a calorimetric microsensor (MEMS), which is integrated with the complete signal conditioning electronics on one single chip. While the flow is measured using the thermal measurement principle, efficient control is provided by an analog controlling circuit. This unique integrated technological approach results in excellent performance and reliability - at a very attractive cost.
                              • Mass Flow Controller SFC5400

                              • The SFC5400 mass flow controller measures and controls mass flows with outstanding accuracy, long-term stability and repeatability and covers an impressively wide dynamic measurement range. The SFC5400 highly configurable and its body housing is made of metal. Furthermore, the flow controller is available with various interfaces and a variety of fluidic connections and measures maximum flow rates from 50 sccm up to 200 slm. The sensor signal is directly converted into a digital, completely calibrated and temperature-compensated signal on the chip. Multiple gas calibrations can be stored on a single device. Additionally, the flow controller can check whether the activated gas calibration matches the actual gas present. The versatility of the SFC5400 makes it the ideal solution for industrial and medical applications.

                                The SFC5400 mass flow controller is, as all sensor products, based on the innovative CMOSens® Technology, which integrates the high-precision sensor element and the analog and digital processing electronics on a single CMOS silicon chip and guarantees an outstanding performance. Combined with high-quality materials, the result is a durably stable, extremely fast and highly precise mass flow controller.

                                Features
                                • Ultra-fast gas flow control (settling time < 100 ms)
                                • High accuracy at lowest flow rates (< 1sccm)
                                • Excellent long-term stability and reliability
                                • No aging effects
                                • Wide dynamic range (turndown ratio 1000:1)
                                • Multigas feature
                                • High configuration
                                • Attractive price-performance-ratio thanks to CMOSens® Technology
                                • Digital and analog interfaces
                                • Flexible mechanical connection options: down mount, VCR and VCO, Swagelok, C-/W-Seal, etc.
                                • Customized versions available on request

                                Applications
                                • Analytical instruments (e.g. gas chromatography, mass spectrometry, thermal analysis)
                                • Medical devices (e.g. ventilation, anesthesia)
                                • Industrial process automation (e.g. coating, thermal processing)
                                • Semiconductor industry (e.g. plasma etching processes, thin film deposition)
                              • Mass Flow Controller SFC5300

                              • The SFC5300 mass flow controller measures and control mass flows with outstanding accuracy, long-term stability and repeatability. It boasts a compact size and an impressive dynamic measurement range. The body housing of the SFC5300 is metal. The SFC5300 mass flow controller is available with downmount connections and two digital interfaces. The SFC5300 is the smaller variant of the SFC5400 mass flow controller and is for cost-sensitive OEM projects with high unit quantities.

                                As all Sensirion sensors, the outstanding performance of the SFC5300 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor technology and the processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is the durably stable, extremely fast and highly precise SFC5300 mass flow controller.

                                Features

                                • High accuracy at lowest flow rates (< 1sccm)
                                • Excellent long-term stability and reliability
                                • No aging effects
                                • Wide dynamic range (turndown ratio 1000:1)
                                • Multigas feature
                                • Attractive price-performance-ratio thanks to CMOSens® Technology
                                • Compact size

                                Applications
                                • Analytical instruments (e.g. gas chromatography, mass spectrometry, thermal analysis)
                                • Medical devices (e.g. ventilation, anesthesia)
                                • Industrial process automation (e.g. coating, thermal processing)
                                • Semiconductor industry (e.g. plasma etching processes, thin film deposition)
                              • Customized (OEM) Mass Flow Controllers

                              • Besides the standard gas flow sensor solutions, Sensirion also offers customized OEM sensor solutions at an attractive price performance ratio. We adapt or develop your customized mass flow controllers according to your specific requirements.

                                Developing your product, we rely on our unique and patented CMOSens® Technology. This technology allows for integrating the highly precise sensor element as well as the electronics for signal processing on one single tiny chip. Correspondingly, gas flow sensor solutions based on CMOSens® set new standards for precision, reliability, functionality and cost effectiveness.
                              • Evaluation Kit EK-F5x

                              • The EK-F5x evaluation kit is a simple test set for the evaluation and qualification of Sensirion SFC5000 mass flow controllers. Precise measurements for test purposes can be made quickly and inexpensively with this easy-to-use kit. The evaluation kit consists of a RS485-to-USB adapter cable, a 100/240V AC adapter, an USB stick with PC software and a Sensirion mass flow controller out of the SFC5000 series.

                                The EK-F5x Viewer software, data sheet and calibration certificate can be downloaded from this page. Installing the software on a PC is quick and easy. No hardware or software configuration or supplementary calibration is necessary. The Windows Viewer software shows mass flow versus time on the monitor and supports data export in a file, enabling subsequent data analysis with Excel.

                                Features
                                • Fast and reliable evaluation and qualification
                                • Enables initial testing of samples
                                • Easy to use with a normal PC
                                • Precise measurement with the SFC5000 mass flow Controller
                            • Gas Meter Modules for Smart Gas Meters

                            • The microthermal gas meter modules from Sensirion enable gas consumption to be reliably monitored in real-time. The modules boast long-term stability and dust and dirt resistance and have proven their mettle in the field for several years. In Germany and Italy, over 100'000 sensors have been integrated in microthermal gas meters. The advantages of the gas meter module make it the epitome of smart energy.
                                  • Microthermal Gas Meter Modules SGM70xx

                                  • The microthermal gas meter modules of the SGM70xx series are available for gas meter sizes G1.6, G2.5, G4 and G6. Due to their compact design, they are easy to integrate in gas meters. The sensor modules are digital, temperature compensated and pressure independent. Furthermore, they are fully calibrated for air and natural gas and have a standard connection and I2C interface. The certified standard products SGM70xx feature GWI-tested software and hardware to compensate for the various gas mixtures. Natural gas meters with integrated gas meter modules from Sensirion can obtain European NMI certification.

                                    The Performance of the gas meter modules SGM70xx is based on the innovative CMOSens® Technology, in which the sensor component and the evaluation circuit are integrated on a single CMOS microchip. The result is a cost-effective system for mass production and long-term stability for applications.

                                    Features
                                    • For G1.6, G2.5, G4 and G6 flow ranges (residential market)
                                    • High reliability and long-term stability
                                    • Dust and dirt resistance
                                    • Gas Quality Compensation (tested by GWI)
                                    • Calibrated for air and natural gas
                                    • Temperature compensated and pressure independent
                                    • Compact design, easy integration
                                    • Digital output (I2C interface)
                                    • Evaluation kit available (only for projects with large unit quantities)

                                    Applications
                                    • Gas Metering
                              • Differential Pressure Sensor for Gases

                              • The differential pressure sensors from Sensirion measure reliably, fast and long-term stable. The fully calibrated and temperature compensated sensors offer highest accuracy and resolution, especially at very low differential pressures. The small and cost-effective design makes them an ideal match for price-sensitive solutions, e.g. in medical and HVAC applications.

                                Sensirion's digital and analog differential pressure sensors are mostly used to measure mass air flow in a bypass configuration. In many high-volume applications, it is the low-cost alternative to complete flow sensors.

                                The outstanding performance of Sensirion's differential pressure sensors is based on the CMOSens® dynamic measuring principle, in which the differential pressure is determined using intrinsic flow measurement. Due to internal intelligence on the CMOSens® sensor chip, the systems are precise and flexible for customized OEM adaptations.
                                  • Differential Pressure Sensor SDP3x

                                  • The SDP3x is the world's smallest differential pressure sensor. It measures just 5 mm x 8 mm x 5 mm, opening up new dimensions of integration and application possibilities. The sensor is based on the next generation of the CMOSens® sensor chip and is the heart of Sensirion's new sensor platform for measuring differential pressure and mass flow.

                                    The SDP3x differential pressure is ideal for the measurement of mass flow in a bypass configuration. The sensor is reflow solderable, provides extended functionality, such as multiple I2C addresses and interrupt functions and a fast sampling time. Like all Sensirion differential pressure sensors, the SDP3x features excellent accuracy and long-term stability and has no zero-point drift. All this makes Sensirion's differential pressure sensor of the SDP3x series the perfect choice for high volume and cost-sensitive applications, where small size is essential.

                                    The digital and fully calibrated and temperature compensated differential pressure sensor are available in different versions. The digital SDP31 sensor and the analog SDP36 sensor measure bi-directional pressure differences up to 500 Pa, while the digital SDP32 and the analog SDP37 measure bi-directional pressure differences up to 125 Pa.

                                    The SDP3x Series

                                    SDP31 - digital version (I2C), pressure range: +/- 500 Pa
                                    SDP32 - digital version (I2C), pressure range: +/- 125 Pa
                                    SDP36 - analog version, pressure range: +/- 500 Pa
                                    SDP37 - analog version, pressure range: +/- 125 Pa

                                    Features
                                    • Smallest size (5mm x 8mm x 5mm), opening up new dimension of integration and applications possibilities
                                    • Measurement range ±500Pa (±2 in. H2O), other ranges available later 2016
                                    • Excellent accuracy and repeatability, even below 1Pa
                                    • No zero-offset, no drift
                                    • Calibrated and temperature compensated
                                    • Fast sampling time of 2kHz at 16 bit resolution
                                    • Digital I2C and analog output versions
                                    • Reflow solderable, shipped in tape and reel for pick and place
                                    • Smart averaging algorithm and other digital and analog features
                                    • Evaluation kit available

                                    Applications
                                    • Medical home care applications
                                    • Portable medical devices
                                    • Smart Inhalers
                                    • Lifestyle and consumer (IoT)
                                    • Appliances
                                    • Drones
                                    • Wind speed meters
                                  • Differential Pressure Sensors SDP600 Series

                                  • The digital differential pressure sensors of the SDP600 series provide a digital I²C output, excellent long-term stability and measure with high sensitivity and accuracy even at low differential pressures (10 Pa). Thanks to its high integration level and clever packaging, the reliable CMOSens® sensor can be offered at an economical price.

                                    The fully calibrated and temperature compensated sensors are available in different versions. The SDP600 is intended for a direct threaded connection to a pressure manifold via O-ring sealing, while the SDP610 is designed for a tube connection. SDP600 series is designed for high-quality mass production, which makes it an ideal fit for demanding OEM applications.

                                    Features

                                    • No offset, zero drift, hysteresis free
                                    • Digital I²C Output
                                    • Accuracy < 0.04% full-scale near zero
                                    • Measurement range ±500 Pa / ±5 mbar / ±2 inch water
                                    • Excellent repeatability (even below 10 Pa)
                                    • Fully calibrated and temperature compensated

                                    Applications
                                    • Medical
                                    • Heating, Ventilating, Air Conditioning (HVAC)
                                    • Gas Boilers, Gas Ovens, Pellet Stoves
                                    • Industrial
                                    • Automotive
                                  • Differential Pressure Sensors SDP800 Series

                                  • Differential pressure sensors of the SDP800 series are the reliable solution for precise air flow measurement in most demanding but cost-sensitive HVAC applications, such as VAV controllers, burners, heat recovery systems and filter monitoring.

                                    The SDP800 differential pressure sensors are based on the next generation of the CMOSens® sensor chip and consequently utilize the successful features of the SDP600 series. They are the result of more than 15 years of experience in measuring air flow in tens of millions of patients, car engines and HVAC systems. The sensors of the SDP800 series can easily be integrated due to their proven form factor. This next-generation sensor chip offers extended functionality, smart averaging functions and multiple measurement modes. Like all Sensirion differential pressure sensors, those from the SDP800 series are characterized by their outstanding accuracy and long-term stability, together with no zero-point drift.

                                    Features

                                    • No offset, no zero-point drift, hysteresis free
                                    • Outstanding accuracy and long-term stability
                                    • Pressure range of up to ±500 Pa (±2 inch H2O / ±5 mbar)
                                    • Excellent accuracy and repeatability (even below 1 Pa)
                                    • Fully calibrated and temperature compensated (-20° C to +85° C)
                                    • For air and non-aggressive gases
                                    • Suited for standard wave soldering

                                    Applications
                                    • HVAC (heating, ventilation, air conditioning)
                                    • Gas boilers, pellet stoves and fuel cells
                                    • Filter Monitoring
                                    • VAV control
                                    • Heat recovery
                                    • Medical (e.g. respiratory devices)
                                  • Differential Pressure Sensor SDP2000

                                  • The SDP2000 differential pressure sensor accurately measures differential pressures up to 3500 Pa (14" H2O) and provides the results on an analog 0 to 4 voltage output. The SDP2000 sensor is suited for demanding applications, for example medical and HVAC systems, where an extra high differential pressure range is needed.

                                    Like all of Sensirion's differential pressure sensors, the fully calibrated and temperature-compensated sensor features excellent long-term stability with high sensitivity at very low differential pressures.

                                    The SDP2000 differential pressure sensor is based on Sensirion’s innovative CMOSens® Technology, which combines the sensor element and processing electronics on a single, small CMOS microchip. CMOSens® differential pressure sensors offer a reliable sensor signal without drift and a high dynamic range.

                                    Features
                                    • Pressure range 3500 Pa (Unidirectional)
                                    • Analog voltage output: 0 to 4 V
                                    • Fully calibrated and temperature compensated
                                    • No offset, zero drift, hysteresis free
                                    • High dynamic range thanks to flow measurement principle
                                    • Not sensitive to the mounting orientation

                                    Applications
                                    • Medical
                                    • Heating, Ventilating, Air Conditioning (HVAC)
                                  • Evaluation Kit EK-P3

                                  • The evaluation kit EK-P3 is designed for an easy and cost-efficient evaluation and qualification of Sensirion's digital differential pressure sensors. The evaluation kit consists of a USB Stick with an adapter cable and a SDP610 differential pressure sensor.

                                    The EK-P3 viewer software as well as the datasheet can be downloaded from this page. The viewer software is easy to install on a computer. No further calibration is necessary.

                                    The software allows measuring at variable resolution, displaying differential pressure in Pa and Inch Water. Absolute or relative timing may be chosen and data are displayed in a graph. The software has the capability for easy data-logging and data may be exported to Excel format.

                                    Features

                                    • Fast and reliable evaluation and qualification (for a reduced time-to-market)
                                    • Easy to connect to a PC
                                    • High-performance measurements thanks to SDP610 differential pressure sensor

                                    SDP610 - Characteristics
                                    • Pressure range: -500 to 500 Pa, -/+ 2" H2O
                                    • Accuracy: 0.2 Pa, + 3% of reading
                                    • Response time: 4.6 ms
                                    • Calibrated gases: Air, N2
                                  • Evaluation Kit EK-P4

                                  • The evaluation kit EK-P4 is designed for an easy and cost-efficient evaluation and qualification of Sensirion's SDP3x differential pressure sensors. Test now the features of the new differential pressure sensor. Especially at lowest pressure differences, the sensor provides highest accuracy and long-term stability.

                                    The evaluation kit consists of a USB stick connected to a PCB on which an SDP3x differential pressure sensor is already attached. The included flow element can be easily affixed to the kit with two screws and then directly connected to the gas flow. Detailed information about the flow element can be found in the application note.

                                    The EK-P4 viewer software, the SDP3x datasheet as well as a quick start guide can be downloaded from this website. The viewer software shows the measured differential pressure using a graph. It allows simple data logging and the export of measurement data in the form of an Excel list. The software is easy to install on a personal computer. No further calibration of the sensor is necessary.

                                    Features
                                    • Fast and reliable evaluation and qualification (for a reduced time-to-market)
                                    • Easy handling, with a Windows PC
                                    • High-performance measurements thanks to SDP3x differential pressure sensor

                                    SDP3x - Characteristics
                                    • Pressure range: -500 to 500 Pa, -/+ 2" H2O
                                    • Accuracy: 0.1 Pa, + 3% of reading
                                    • Calibrated gases: Air, N2
                                  • Evaluation Kit EK-P5

                                  • The EK-P5 evaluation kit provides a straightforward and cost-effective option for testing and evaluating Sensirion's digital differential pressure sensors of the SDP800 series.

                                    The evaluation kit comprises a USB stick that is connected to the SDP810-500Pa differential pressure sensor with an adapter cable. Using the viewer software, the differential pressure sensor can be tested under realistic conditions by following the simple installation steps. There is therefore no need to program a microprocessor, as the evaluation kit is connected directly to a PC. The included software can be used to display measured values on the screen and makes it possible to export the data to an Excel datatype. This enables the data to be saved and processed in a simple manner.

                                    Features

                                    • Fast evaluation (for a reduced time-to-market)
                                    • Easily connected to a PC
                                    • High-performance measurements thanks to SDP810 differential pressure sensor
                                     
                                • Customized OEM Solutions

                                • For applications not covered by standard commercial products, Sensirion offers individual OEM solutions and special customized system solutions featuring unbeatable value for money. We aim to always offer refined and economical products that exactly meet your needs. Our many years of experience make this possible. See for yourself.
                                    • Customized (OEM) Mass Flow Meters

                                    • Besides the standard gas flow sensor solutions, Sensirion also offers customized OEM sensor solutions at an attractive price performance ratio. We adapt or develop your customized mass flow meters according to your specific requirements.

                                      Developing your product, we rely on our unique and patented CMOSens® Technology. This technology allows for integrating the highly precise sensor element as well as the electronics for signal processing on one single tiny chip. Correspondingly, gas flow sensor solutions based on CMOSens® set new standards for precision, reliability, functionality and cost effectiveness.

                                      During the development process, you can rely on Sensirion's highly qualified project teams. Thanks to our committed and competent employees you always benefit from fast and effective technical Support.
                                    • Customized OEM Liquid Flow Meters

                                    • Sometimes innovative ideas ask for new solutions and the team of experts at Sensirion is always keen on finding ways to make interesting applications happen through our technology. Customizations are made to fit special requirements, such as resistance to aggressive chemicals, limited space constraints or dedicated low-price and even disposable sensor designs for high-volume applications.

                                      Our cutting-edge sensor technology and a wealth of experience in liquid flow sensing lead to many successful customer projects. Customized sensors are used in a variety of applications, such as medical devices, diagnostic equipment or process control. The essential goal is to understand the requirements of our customers and to skillfully implement the key benefits of our technology to their advantage:

                                      Low Flow Rates
                                      Years of experience and expertise combined with the high sensitivity of our sensors enables flow measurement in extremely low ranges, from nanoliters to milliliters per minute.

                                      High Speed
                                      The MEMS sensor integrated on a CMOS chip permits ultra-fast response times below 50 ms due to its small thermal mass.

                                      Flexibility and Cost-Efficiency
                                      With our advanced technology, Sensirion has the flexibility to address the customer’s requirements in a way that ensures a customized sensor solution which is both high-performance and cost-efficient.

                                      Features
                                      • Flow rates from nl/min up to 120 ml/min
                                      • Media isolated sensing principle - no direct sensor contact with the fluid
                                      • High speed: 50 ms response time and better
                                      • Bio-compatible and high chemical resistance
                                      • Small size micro and nano flow meters
                                      • Ultra high sensitivity (< 0.5 nano liter/min)
                                    • Customized (OEM) Mass Flow Controllers

                                    • Besides the standard gas flow sensor solutions, Sensirion also offers customized OEM sensor solutions at an attractive price performance ratio. We adapt or develop your customized mass flow controllers according to your specific requirements.

                                      Developing your product, we rely on our unique and patented CMOSens® Technology. This technology allows for integrating the highly precise sensor element as well as the electronics for signal processing on one single tiny chip. Correspondingly, gas flow sensor solutions based on CMOSens® set new standards for precision, reliability, functionality and cost effectiveness.

                                      During the development process, you can rely on Sensirion's highly qualified project teams. Thanks to our committed and competent employees you always benefit from fast and effective technical Support.
                                  • Markets

                                  • Sensirion’s sensors are used in a wide range of markets and different applications. In many markets, Sensirion’s years of experience and continuous innovation have made us the market leader. Again and again, Sensirion sets the standard in markets around the world.
                                      • Appliances

                                      • Thanks to the use of innovative sensor solutions, we help household appliance manufacturers make their systems more energy-efficient, lowering power consumption for the end consumer. For example, instead of powering built-in heaters in refrigerators all the time they can be activated only when a risk of condensation exists. Our sensors can also be used to optimize humidity and temperature in the refrigerator enhancing freshness and extending shelf life.

                                        Other fields of application where our sensors can be used to increase quality of life and lower energy consumption include air conditioners, dehumidifiers, and air purifiers.

                                        Applications
                                        • Air Conditioners
                                        • Air Purifiers
                                        • Thermostats
                                        • Refrigerators
                                        • Dryers
                                        • Washing Machines
                                        • Gas Boilers
                                        • Pellet Stoves
                                        • Gas Ovens
                                      • Building Technology

                                      • The technical infrastructure of buildings and the accurate measurement of environmental influences form the basis for a pleasant indoor climate. Using Sensirion’s proven sensor solutions, we help ensure energy-efficient operation of family homes, industrial facilities, and entire building complexes also increasing the level of comfort. Often, the interrelationships in buildings are particularly complex, so that finding the right parameters to measure is very difficult.

                                        This is where our sensor experts can help with their many years of experience. With our wide-ranging knowledge of sensor technology, we are able to support our customers and help them save energy, reduce operating costs, and improve the indoor climate. For example, our differential pressure sensors ensure optimum heat recovery from the exhaust air of buildings, thus substantially minimizing energy consumption.

                                        Applications
                                        • Heating, Ventilation, Air Conditioning
                                        • Thermostats
                                        • VAV Control
                                        • Heat Recovery Systems
                                        • Filter Monitoring
                                        • Burner Control
                                        • AC Ventilation / Fan Control
                                        • Clean Rooms
                                        • Fume Hoods
                                        • Fuel Cells
                                      • Industrial Automation

                                      • Reliable processes and durability are essential in industrial automation. Sensirion’s proven sensor solutions help companies to optimize processes and make them as efficient as possible. As the leading expert in the field, Sensirion has unique expertise in sensor integration, even where conditions are particularly challenging. Thanks to this, Sensirion defines the market standard over and over again.

                                        Applications
                                        • Analytical Instruments:
                                        • Mass Spectrometry, Thermal Analysis, Gas/Liquid Chromatography
                                        • Coating:
                                        • Thin Film & Crystalline Silicon PV, Physical & Chemical Vapor Deposition, Diffusion Furnace
                                        • Dispensing
                                        • Leakage Testing
                                      • Automotive

                                      • Sensirion offers comprehensive sensor solutions for the automotive market with outstanding quality, low prices, and expert support. Using Sensirion’s proven sensor solutions, we help automotive manufacturers meet stringent emission standards in the automotive industry. Our sensors set new standards in terms of comfort, safety, and energy consumption. They ensure that cabin air is always optimally regulated inside the vehicle for the driver by means of air-conditioning or climate-controlled seats. Furthermore, by determining the dew point the vehicle’s air-conditioning can be controlled to eliminate fogging of the windshields and ensure a clear view of the road ahead.

                                        Applications
                                        • Climate Control
                                        • Anti-Fogging
                                        • Climate Seat
                                      • Consumer Electronics

                                      • Sensirion brought environmental sensing to the field of consumer electronics. By using our proven sensor solutions we help manufacturers of mobile devices and wearables to make their applications smarter and create new ones that offer customers added value. Our sensors enable a whole range of new applications in the areas of comfort and indoor navigation.

                                        Applications
                                        • Wearables
                                        • Mobile Phones
                                        • Tablets
                                      • Medical Technology

                                      • Medical devices must meet the highest standards in terms of quality and reliability. Doctors, nurses, and patients benefit daily from applications in the field of medical technology that are getting smarter by the day. The use of proven Sensirion sensor solutions contributes to this and offers the possibility of making applications safer, more reliable, and more convenient. Our many years of experience in the field of medical technology make us the preferred experts for leading medical-technology companies.

                                        Applications
                                        • Home Care Devices (Ventilation)
                                        • Critical Care Devices (Ventilation)
                                        • Anesthesia
                                        • Point-of-Care Diagnostic
                                        • Drug Delivery / Infusion
                                        • Catheters
                                        • Smart Inhalers
                                        • Metabolic measurements
                                        • E-Health / M-Health
                                      • Internet of Things

                                      • The Internet of Things (IoT) is no longer just a vision but a reality. Although it is hardly visible, digital networking has been around much longer. Terms such as Internet to Machine, Internet of Everything (IoE), and Machine to Machine (M2M) are also often used in this context. All have the same goal, though: to make the world smarter, simpler, and more efficient. Sensors play a major role here. Using our sensor solutions, applications in the areas of smart homes or smart energy can be developed, which make daily life significantly easier and more convenient for the user, and also offer a financial advantage by reducing energy costs. As a leading supplier of sensor technology, we help our customers by ensuring that their applications in the area of the IoT are among the best.

                                        Our Expertise – Your Benefit
                                        Correctly measuring physical parameters in complex systems requires extensive knowledge and many years of experience. As a leading sensor expert, we support our customers from the integration of our sensors to the connection to the cloud, thus offering comprehensive solutions for applications in the area of the IoT. Hence, we are the perfect partner when it comes to taking your application to the next level.
                                      • Smart Home

                                      • The Internet of Things (IoT) makes our house a smart home: effectively an interconnected living area where machines, too, interact with each other. Due to this tight network of and communication between electronic devices via sensors, a house “learns” how best to work according to the requirements of its occupants. For example, it controls and monitors the power consumption, household appliances, heating and ventilation, etc. This smart control increases the quality of life and living significantly, and leads to a more efficient use of energy.

                                        Smart control is based on the measurement of ambient parameters such as humidity, temperature, and air quality. Often, however, the electronic devices distort the measurement through their own heat or gas emissions so that even correct data acquisition becomes a major challenge. A customized implementation of the sensors in the respective application is crucial to obtaining precise and realistic results.

                                        Thanks to our many years of experience in sensor technology and software development, we are the only company to offer holistic solutions for applications in the areas of IoT and smart homes – from the implementation of the sensors to industrialization support. This makes us a valuable partner who can support you in all matters relating to a more comfortable life at home.

                                        Applications
                                        • Smart Thermostats
                                        • IP/Security Cameras
                                        • Environmental Hubs
                                      • Smart Energy

                                      • Sensirion stands for smart energy: Our goal is to make the world smarter, more comfortable, and more resource-conserving. For example, our gas meter modules allow billing of gas consumption in real time, and provide more transparency and better control options for energy utilities and end consumers, making it possible to reduce gas consumption in the long term and prolong equipment service life. Sensirion offers sensor solutions for gas meters, gas stoves, pellet stoves, fuel cells, and gas boilers. All products are characterized by high reliability and long-term stability.

                                        Applications
                                        • Gas Meters
                                        • Submetering on Apartment Level
                                        • Submetering on Appliance Level
                                        • Gas Boilers
                                        • Pellet Stoves
                                        • Gas Ovens
                                        • Fuel Cells
                                    • Technology

                                        • CMOSens® - Core of Sensirion's Sensor Solutions

                                        • Sensirion sensor products guarantee outstanding performance and correspondingly high customer utility. They are all based on our innovative CMOSens® Technology, which enables the sensor component to be combined with the analog and digital signal processing circuitry on a tiny CMOS silicon chip. This is implemented in advanced semiconductor technology, using specific microsystem processing steps to produce the microsensor structures on specially developed and patented semiconductor parts. The resulting sensor chips enable precise and reliable sensing of the desired physical parameters, such as relative humidity, temperature, or mass flow. CMOSens® accordingly represents a guarantee of high precision, reliability, and functionality combined with cost effectiveness.

                                          Precision and Reliability
                                          Combining the sensor with the signal processing circuitry ensures that the weak analog sensor signals can be amplified and digitized with high precision directly where they are generated, thereby making them resistant to interference. This provides the basis for the extremely high measurement accuracy of CMOSens® sensors. With the elimination of fault-prone solder joints, users also benefit from outstanding long-term stability, as has been proven by extensive field tests. Furthermore, CMOSens® Technology is based on proven and reliable standard processes used in semiconductor fabrication, which also contribute to the high reliability and reproducibility of Sensirion sensor solutions.

                                          Functionality
                                          CMOSens® chips are intelligent microsensor systems with a high degree of integration and functionality. This is provided by analog and digital signal processing, which is integrated on the semiconductor chip along with the sensor component. Our chips are further enhanced by additional intelligence for self-tests, low-power operation, and built-in linearization, digitization and temperature compensation (the latter using an integrated temperature sensor). The present high level of functionality and intelligence results from many years of development work, as can be seen from the evolutionary stages leading up to the present chip generation:

                                          1st generation: miniaturized sensor component

                                          2nd generation: 1st generation plus amplifier and A/D converter

                                          3rd generation: 2nd generation plus intelligence for linearization and temperature compensation

                                          4th generation: 3rd generation plus memory to hold calibration data

                                          Cost Effectiveness
                                          As a standard semiconductor fabrication process, CMOS is optimized for reliable mass production. Sensors fabricated in CMOSens® Technology are based on this cost-optimized standard process, which assures customers of an optimal price/performance ratio. Merging the sensor components with the signal processing circuitry on a single small chip allows system costs and package sizes to be reduced even further compared with conventional sensors. As a result, users obtain extremely high reliability and quality at a lower price.

                                          Testing & Calibration
                                          An important technical benefit for customers of Sensirion products is that our digital sensor systems are fully calibrated. This means that expensive and difficult calibration procedures no longer have to be performed by the customer. Our in-house sensor calibration and testing infrastructure allows effective testing and calibration procedures according to established quality standards. The results are high quality, fully interchangeable multi sensor modules at unbeatable price-performance ratios.
                                        • Humidity Sensors with CMOSens®

                                        • Capacitive Humidity Sensor Principle
                                          In addition to the resistive method, the capacitive measurement principle, above all, established and proved itself as a standard in the past. For this principle, the sensor element is built out of a capacitor. The dielectric is a polymer which absorbs or releases water proportional to the relative environmental humidity, and thus changes the capacitance of the capacitor. This change in capacitance can be measured by an electronic circuit. This allows the relative air humidity to be determined. For humidity sensors with CMOSens® technology, a "micro-machined" finger electrode system with different protective and polymer cover layers forms the capacitance for the sensor chip, and, in addition to providing the sensor property, simultaneously protects the sensor from interference in ways previously not achieved.

                                          Humidity, Temperature and Dew Point
                                          The temperature sensor and the humidity sensor together form a single unit. This also enables an accurate and point-precise determination of the dew point, without incurring errors due to temperature gradients between the humidity and the temperature sensors. Through the unique linkage of these sensor elements with the signal amplifier unit, the analog-to-digital converter, the calibration data memory, as well as the digital, bus-ready interface, all on a surface area of a few square millimeters.

                                          Highest Stability and Performance
                                          Total coverage with condensation or even immersion in liquid present no problems whatsoever. Over two years of hardness tests have already shown this result. The signal amplification near the sensor allows the polymer layers to be optimized not for the signal strengths, but rather for long-term stability, which is significant for numerous applications. The analog-to-digital conversion, which is also performed "in place," makes the signal extremely insensitive to noise. A checksum generated by the chip itself is used for additional reliability. Last but not least, the calibration data loaded on the sensor chip guarantees that Sensirion humidity sensors have identical specifications and thus they can be replaced 100%. Other obvious advantages are the very short response times (4 sec at 1/e), high precision (±2% to ±5% according to configuration), as well as very low power consumption (< 3µA standby).

                                          Digital Interface
                                          Humidity and temperature sensors with CMOSens® technology can be connected directly to any microprocessor system by means of the digital 2-wire interface, which minimizes the system development times, saves costs, and leads to a significant advantage, especially for high-volume applications.
                                        • CMOSens® in Liquid Flow Measurement

                                        • For more than 30 years, thermal mass flow measurements using coils around a steel capillary have been the standard in the precise measurement and dosing of mass flow rates.

                                          The new CMOSens® Technology integrates this basic physical measuring principle in an extremely fast, miniaturized thermal sensor with all of the high-precision signal-conditioning circuitry on a single CMOS microchip. A heating element on the microchip adds a minimal amount of heat to the medium for the thermal flow measurement. Two temperature sensors, symmetrically positioned above and below the source of the heat, detect even the slightest temperature differences, thus providing the basic information about the spread of the heat, which itself is directly related to the flow rate. Integration on a single chip ensures that the sensitive analog sensor signals can be amplified with high precision, digitalized and further processed. Semiconductor technology also allows small, battery-operated sensor modules to run very well.

                                          Digital signal processing and the stored calibration data together provide repeatability of < 0.6% of the measurement value and allow for the output of a linear, completely calibrated, temperature-compensated flow measurement signal with speeds up to 1000 values per second. As this type of sensor has a completely digital internal function, output signals may be provided as either analog or digital outputs.

                                          In addition to interesting solutions for gas applications, CMOSens® Technology allows mass flow measurements for ultra low liquid flow rates. Sensors based on this new principle are extremely fast, small, lightweight, and can be produced in large quantities. The accurate measurement of volume flow within the range of several milliliters per minute, and even down to the sub-nanoliter range, poses no problem.

                                          Just a Straight Flow Channel

                                          In the most diverse application areas, a liquid medium must be completely separated from its environment, and pressure resistance must be ensured. To this end, Sensirion has come up with a surprising solution, which has been patented in the meantime: Special packaging means the highly sensitive microsensor chip is media-isolated by the flow channels wall which can be made of glass, ceramic or plastic. The chip can measure mass flows inside the channel in nanoliters, microliters, or milliliters per minute with the greatest accuracy. The sensor for the fluid system is a simple, straight tubing without seals, dead volumes or restrictions. According to the flow range, the internal diameter can be several millimeters or micrometers. A digital sensor for liquid flow based on this new technology is already up to 100 times faster, 10 times smaller and 25 times lighter than previous conventionally designed flow meters, which means optimization potential is not exhausted and battery-operated variants are possible.
                                        • CMOSens® Technology for Gas Flow and Differential Pressure

                                        • All on One Chip
                                          At the heart of Sensirion's sensor products is our innovative CMOSens® Technology which enables us to combine the sensor component with signal-processing circuitry on a tiny CMOS silicon chip. The CMOSens® sensor provides error-free gas flow metering that remains stable over long periods of time and generates a very fast, high-precision sensor signal.